发明名称 |
Contaminant resistant barriers to prevent outgassing |
摘要 |
An integrated circuit comprises a dielectric layer disposed outwardly from a semiconductor substrate, the dielectric layer comprising at least one cavity having sidewalls extending from an outer surface of the dielectric layer inwardly toward the substrate. The integrated circuit further comprises a contaminant resistant barrier disposed outwardly from at least the sidewalls of the cavity in the dielectric layer.
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申请公布号 |
US6066893(A) |
申请公布日期 |
2000.05.23 |
申请号 |
US19980159039 |
申请日期 |
1998.09.23 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WISE, RICK L. |
分类号 |
H01L21/02;H01L21/8242;H01L23/00;(IPC1-7):H01L23/58;H01L27/108;H01L29/76;H01L29/94;H01L31/119 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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