发明名称 Vertical wafer boat
摘要 A pair of annular end plates and a plurality of bars which are made of silicon carbide are formed in an integrally coupled/joined structure, having an entire length of not less than 800 mm. The end plates are unitary annular plates. Padding of silicon carbide is formed at a coupled/joined portion between an end plate and a bar so that the coupled/joined portion exhibits an obtuse corner.
申请公布号 US6065615(A) 申请公布日期 2000.05.23
申请号 US19970805227 申请日期 1997.02.24
申请人 ASAHI GLASS COMPANY, LTD. 发明人 UCHIYAMA, TAROH;TSUKAMOTO, TAKASHI;NISHIHAMA, JIRO
分类号 H01L21/673;(IPC1-7):A47F7/00 主分类号 H01L21/673
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