Method of making an article comprising a SiOx layer,申请号EP19950302114-传众专利搜索

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发明名称	Method of making an article comprising a SiOx layer
摘要
申请公布号	EP0676797(B1)	申请公布日期	2000.05.17
申请号	EP19950302114	申请日期	1995.03.29
申请人	AT&T IPM CORP.	发明人	CHAND, NARESH;OSENBACH, JOHN WILLIAM;COMIZZOLI, ROBERT BENEDICT;ROXLO, CHARLES BLAKELY;TSANG,WON-TIEN;KOLA,RATNAJI RAO
分类号	H01L21/3105;H01L21/316;H01L33/44;H01S5/00;H01S5/022;H01S5/028;(IPC1-7):H01S5/02;H01S3/00;C30B23/02	主分类号	H01L21/3105
代理机构		代理人
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