Device for fixing lower members and fluid control apparatus incorporating same

摘要

Bolt bores (107) in lower members (31,33) each comprise a large-diameter portion (107a) larger than the head (110a) of a bolt (110) in diameter, and a small diameter portion (107b) extending downward from the large-diameter portion (107a) with a stepped portion (107c) formed therebetween and having a diameter intermediate between the diameter of the bolt head (110a) and the diameter of the shank (110b) of the bolt. A heat insulator (122) has a spacer inserting hole (123). A hollow cylindrical spacer (121) having an inside diameter larger than the diameter of the bolt shank (110b) is inserted through the small-diameter portion of the bolt bore (107b) and the spacer inserting hole (123) so that the upper end of the spacer (121a) is positioned in the large-diameter portion (107a). The spacer (121) has a lower end bearing on a support member (108). A hollow cylindrical elastic member (112) is interposed between the bolt head (110a) and the stepped portion (107c) for biasing the lower member (31,33) toward the support member (108).