| 摘要 |
PROBLEM TO BE SOLVED: To surface-treat a substrate erected in a treating tank filled with a cleaning soln. and to make the device compact by bringing out plural substrates horizontally placed in a transport cassette and erecting the substrates. SOLUTION: Plural substrates placed in a treating cassette are cleaned with various cleaning solns. or dried in the plural treating tanks 21a to 21g arranged along a U-shaped transport line. The surface-treating robots 23, 24 and 25 for receiving the treating cassette from an attitude changing robot 22 for erecting the cassette horizontally placed on the holder 14 of a loader 1, transporting the cassette along the transport line, inserting the cassette into the respective treating tanks 21a to 21g, cleaning or drying the cassette, and an attitude changing robot 26 for receiving the erected cassette from the surface-treating robot 25, laying the cassette and placing the cassette on the holder 31 of an unloader 3 are set up in a surface-treating part 2. As a result, the substrate is erected and surface-treated in the treating tanks 21a to 21g, and the device is made compact. |
