| 摘要 |
PROBLEM TO BE SOLVED: To enable a substrate to be conveyed without deformation although the substrate is thin. SOLUTION: A conveyance system comprises an upper belt 1 and a lower belt 2 having a plurality of clips, and is constructed so as to vertically stand a substrate 7 conveyed in a horizontal position and grasp the upper edge and lower edge of the substrate 7 with the clips 3 of the upper belt 1 and lower belt 2, respectively and convey the substrate 7 in the horizontal direction. In the case, after standing the substrate 7 vertically, the substrate 7 is passed between one pair of rotatable rollers 13 which are oppositely placed at an established interval to correct the deformation of the substrate 7. |
