| 摘要 |
PROBLEM TO BE SOLVED: To obtain a device that can measure the pressure distribution of a thin fluid layer of a fluid bearing. SOLUTION: In this measuring device, in an air bearing that supplies compressed air to a pressure chamber 2A being formed between a bearing guide 1A and a bearing body 4A and floats the bearing body 4A by the compressed air, an interference optical system is composed of a boundary surface 4a on the body side of the pressure chamber 2A that reflects light from a light source 5A, a boundary surface 1a on the guide side of the bearing guide 1A for transmitting light from the light source 5A, and the air layer of the pressure chamber 2A that is formed by the body- and guide-side boundary surfaces 4a and 1a, an optical information acquisition means 9A that takes in the interference-fringe information of the interference optical system is provided, and the difference in the partial density of the air layer is taken in as the interference-fringe information, thus obtaining a pressure distribution state.
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