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发明名称
ROTARY COATING APPARATUS
摘要
申请公布号
JPS5246903(A)
申请公布日期
1977.04.14
申请号
JP19750121593
申请日期
1975.10.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKATANI MASAAKI;HATSUHARA TOSHIHIKO;SUMIBE HISAO;MIKI HIDEJIROU
分类号
B05C11/08;B05C9/12;B05D1/40;G03F7/16;H01L21/027;H01L21/312
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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