发明名称 MIXING DEVICE
摘要 PROBLEM TO BE SOLVED: To continue the supply of liq. from a supply line to a storage tank till each liq. reaches a prescribed amount by a signal from a measuring means when a valve means is opened at the time of generation of an urgent stop signal. SOLUTION: Liquid including plural components in a prescribed ratio is mixed by measuring means 7-9 and valve means 12-14 provided respectively at supply lines 4-6 in which liquids different in component are made to flow, respectively. In such a case, at the time of generation of the urgent stop signal, when either of the valve means 12-14 are opened, the liq. supply from the supply lines 4-6 to the storage tank 15 is continued till each liq. reaches the prescribed amount by the signal from the measuring means 7-9.
申请公布号 JP2000135426(A) 申请公布日期 2000.05.16
申请号 JP19980310423 申请日期 1998.10.30
申请人 TOKICO LTD 发明人 TSUNOKAKE YASUHIRO;IWATA TERUFUMI;FUNAHASHI TATSUYA;YOSHIKURA HIROSHI;FUJINUMA YUJI
分类号 H01L21/304;B01F15/04;(IPC1-7):B01F15/04 主分类号 H01L21/304
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