ELECTRO-OPTIC DEVICE AND ITS MANUFACTURING METHOD USING THIN FILM OF ORGANIC MOLECULAR-SILICA COMPOSITE

摘要

PURPOSE: A device and its manufacturing method is provided to enhance an optic transmissivity and a stability of an electro-optic coefficient with respect to a heat or a time, and simplify the production processes by using a composite membrane that organic molecular with electro-optic characteristics coherently bonds with a silica body. The composite membrane can be manufactured under aa low temperature by using a sol-gel method. CONSTITUTION: The device includes a base plate(40), a lower electrode(50), a membrane(10)of the organic molecular-silica composite, a lower cladding layer(60), an upper cladding layer(70), an upper electrode(30). The membrane(10) includes optical wave guides(11) having the electro-optic characteristics by an electric polling process. The electric polling process comprises steps of forming an optical bleaching mask by making a 1st metal layer and patterning the 1st metal layer into the optical wave guide; forming the optical wave guide by scanning optical ray to the patterned shape; polarizing the organic molecular within the membrane(10) after forming a 2nd metal layer on the wave guide.