SEMICONDUCTOR MANUFACTURE APPARATUS WITH SAFETY DEVICE

摘要

PURPOSE: A semiconductor manufacture apparatus with safety device is provided to prevent safety accidents due to arbitrary operation of a cover by the breakdown of a driver. CONSTITUTION: A semiconductor manufacture apparatus with safety device comprises: a chamber(20); a cover(30) of the chamber; a driver(40) for opening or closing the cover; and a holder(85). The holder is unlocked when the driver is operated and to fix the position of the cover when the operation of the driver is completed. The driver(40) comprises an air cylinder(50), a guider(55), and a slider(80) coupled to the cover in order to be slided against the guider.