| 摘要 |
PURPOSE: A device for providing a slurry is provided to prevent the slurry element from being conglomerate by using the ultrasonic and to prevent the surface of the wafer from being scratched by decomposing the conglomerated slurry element. CONSTITUTION: A device comprises a slurry(1), a mixed slurry(2), a slurry for supply(3), a drum(10, 110), a slurry absorbing tube(11, 111), a upper reflection plate(12), a lower reflection plate(13), an ultrasonic generator(14), a middle pump(20), a filter(30, 80), a mixture tank(40), a slurry supply tube(41), a DI supply tube(42), a circulation tube for a mixed slurry(43), a valve(44, 61, 64, 66), an absorbing tube for a mixed slurry (45), a mixture pump(50), a supply tank(60), a supply tube for a mixed slurry(62), a circulation tube for slurry supply(63), a supply pump(70), and a supply tube(81). A certain amount of slurry is kept in the drum(10, 110). The ultrasonic generator(14) is installed at the drum to prevent the conglomeration of the slurry element.
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