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发明名称
摘要
申请公布号
JP3042097(B2)
申请公布日期
2000.05.15
申请号
JP19910301466
申请日期
1991.11.18
申请人
发明人
分类号
C30B11/00;H01L21/208;(IPC1-7):C30B11/00
主分类号
C30B11/00
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