MOUNTING METHOD OF SEMICONDUCTOR MANUFACTURE DEVICE

摘要

PURPOSE: A mounting method of semiconductor manufacture device is provided to easily and rapidly mount the device on a grating in manufacturing line because the device can be mounted in one time. CONSTITUTION: A mounting method of semiconductor manufacture device comprises steps of: establishing a mounting reference of the device on both of the device and a grating; establishing the shape and size of a portion connecting the device and utilities; a step forming a tool having same holes as the connecting portion in shape and size; marking on the grating; cutting the grating along the marking formed on the grating; and mounting the device on the grating. The tool has the same mark as the reference.