| 摘要 |
PROBLEM TO BE SOLVED: To make performable noncontact measurement of the profile of an object to be measured with highly accurately at a high speed. SOLUTION: In the method for obtaining the profile of an object to be measured 6 by irradiating it with line laser light 15 and measuring the varying state of reflected light through cameras, the plurality of cameras include cameras 18a, 18b for rough measurement and cameras 19a and 19b for precise measurement. Rough measurement is performed by scanning the object once with a laser oscillator 16 and the cameras and a first three-dimensional profile measurement data on the object is generated based on a first image data outputted from the rough measurement cameras. When the object is scanned with the precise measurement cameras, a motion control data for moving the precise measurement cameras while keeping a specified distance from the surface of the object is generated from the first three-dimensional profile measurement data. Based on the motion control data, the object is scanned with the laser oscillator and the precise measurement cameras and precise measurement is performed by means of the precise measurement cameras and then a second three-dimensional profile measurement data on the object is generated based on the second image data outputted from the precise measurement cameras.
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