| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern selector which allows reduction in the circuit scale adapted to increase in functions and pins of devices under test. SOLUTION: A pattern selector 12 selects any of pattern data 2-1∼2-n according to a pattern select signal 10 and outputs it as an output signal 6-1 to pin electronics, etc., of a semiconductor tester. Select data for each pattern selector circuit are sent in time-sharing to select data 3. Registers 7-1∼7-q take in the select data 3 according to mutually independent clocks 5-11∼5-1q and output them as select data 8-1∼8-q, respectively. A data selector 19 selects any of the select data 8-1∼8-q according to a data select signal 24 and outputs as a pattern select signal 10. A selector 23 selects any of data select signals 4-1∼4-t according to a select signal 22-1 and outputs as a data select signal 24.
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