| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a semiconductor light- emitting element, wherein the composition of a semiconductor crystal grown alternately is made constant, so that a light-emitting element with less dispersion in characteristics is formed. SOLUTION: A semiconductor substrate 22 is housed in a growth chamber 24 of a main body 21, first and second solutions are introduced and discharged alternately into a growth chamber 24 from first and second solution reservoirs 26a and 26b, so that first and second layers are grown alternately at a semiconductor substrate 22. Here, the growth chamber 24 is tilted in one direction, while the lower end of the bottom surface of the growth chamber 24 is tilted in the lower-stream direction is provided with a discharge opening 27, and a solution after process for layer-formation is discharged from the discharge opening 27 to a waste liquid part 30 below. |
