发明名称 X-RAY CONDENSING ELEMENT AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To achieve performance closest to that of a condensing element where an elliptical columnar surface being replaced by an approximate cylindrical surface by a simple calculation is used as a reflection surface and at the same time manufacture a condensing element easily by setting the center side of a cylindrical surface in a specific region to a reflection surface in an element for condensing X rays being scattered from an X-ray source located at one focal point of the elliptical columnar surface at the other focal point position. SOLUTION: An X-ray condensing element 2 condenses X rays 1 at the other focal point F2 from the position of one focal point F1 of an elliptical columnar surface represented by an expression X2/a2+Y2/b2=1(a>b>0) in rectangular coordinates XYZ. In a region being expressed by an expression -X0<=X<=X0<a, Y>=0, 0<=X0(0, 1)1/2 a2/(a2-b2)1/2, the side of a center C of a cylindrical surface being expressed by an expression X2+(Y+Rc-b)2=Rc2, Rc=(a2/b)[1- (a2-b2)/2 a4}X02]. Further, a multilayer film 2c is formed on a substrate 2b with a reflection surface 2a, and the periodical length is set for diffracting X rays 3 at an arbitrary point of the reflection surface 2a.
申请公布号 JP2000131498(A) 申请公布日期 2000.05.12
申请号 JP19980306874 申请日期 1998.10.28
申请人 RIGAKU INDUSTRIAL CO 发明人 SHIMIZU KAZUAKI
分类号 G21K1/06;(IPC1-7):G21K1/06 主分类号 G21K1/06
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