| 摘要 |
PROBLEM TO BE SOLVED: To obtain superior setting accuracy, while achieving high-speed processing with a binary research system by changing measured delay time in ascending or descending order, and at the same time by changing each delay time setting value in the order of the delay times. SOLUTION: Setting value storage parts 132A-132N, corresponding to the number of test pattern generation channels, are provided in main control equipment 111. When a setting value is to be stored into the storage parts 132A-132N, delay time is first measured while each setting value is given to a variable delay device 130 of each channel. Then, the measured delay time is changed in an ascending or descending order, the array of the setting values is also changed according to the array of the changed delay time, the setting value where the array is changed is stored, and the setting value is read according to the order of the array. Since the delay time of the variable delay device 130 becomes linear, for example the delay time is stored into the storage part 132A and is read in this order, thus accurately setting a target value even with a method for determining the delay time by a binary search system.
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