| 摘要 |
PROBLEM TO BE SOLVED: To improve the efficiency of a work upon inspection of a humidity sensor by shifting to a humidity sensor inspection mode for measuring whether or not the humidity sensor normally operates by a simple operation in a manufacturing process of the humidity sensor having the sensor inspection mode and an ordinary mode. SOLUTION: Under a state of no load in which an object to be heated is not present, a microwave range 31 perfoms a heating operation so that data sensed by a humidity sensor is displayed on the display part of the microwave range 31. Then, the data displayed on the display part is read by a CCD camera 25 and the read image is analyzed in an image recognizing, deciding and inspecting part 27 and the result is displayed on the display part 28.
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