发明名称 PRESSURE DETECTOR
摘要 PROBLEM TO BE SOLVED: To obtain a pressure detector whose production process is simplified and in which the reliability of electrical connections is enhanced by a method, wherein a land part on a printed circuit board and an electrode part for a pressure sensor are connected electrically by using an anisotropically conductive film or the like. SOLUTION: An electrode part 25 which is formed at a semiconductor sensor element 18 for a pressure sensor 5 and a connecting land 20 on a printed circuit board 6 are connected directly by using an anisotropically conductive film 26 or the like. At this time, the printed circuit board 6 is formed to be a frame shape which removes a part corresponding to a diaphragm 17, so that the displacement of the diaphragm 17 at the semiconductor sensor element 18 due to the application of pressure is not impaired. In addition, the anisotropically conductive film 26 is formed similarly to be a frame shape. Then, the connecting land 20 on the printed circuit board 6 and the electrode part 25 for the pressure sensor 5 are made to correspond via the anisotropically conductive film 26, and the printed circuit board 6 and the pressure sensor 5 are connected electrically by a thermocompression bonding. Thus, the wire bonding operation of the pressure sensor 5 to the printed circuit board 6 can be abolished.
申请公布号 JP2000131172(A) 申请公布日期 2000.05.12
申请号 JP19980308013 申请日期 1998.10.29
申请人 NIPPON SEIKI CO LTD 发明人 NAKAHARA TAKESHI;SATO TAKAO
分类号 G01L9/04;G01L9/00;H01L29/84;(IPC1-7):G01L9/04 主分类号 G01L9/04
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