发明名称 UNPOLISHED WORK HOLDING BOARD AND PRODUCTION METHOD THEREOF AND WORK POLISHING METHOD AND DEVICE
摘要 An unpolished work holding board having a high-precision work holding surface obtained by improving materials for the holding board body of an unpolished work holding board which vacuum-sucks/holds a work and for a resin coating spread on a work holding surface, and by developing a resin coating method which does not close with resin through holes in the holding board body; and a production method thereof. An unpolished work holding board provided with a work holding board body having many through holes for vacuum-sucking/holding a work, wherein the holding surface of the holding board body is covered with a coating formed by heat-curing a thermosetting resin spread on the holding surface and the surface of the coating is polished; and a production method thereof.
申请公布号 WO0025981(A1) 申请公布日期 2000.05.11
申请号 WO1999JP05852 申请日期 1999.10.22
申请人 SHIN-ETSU HANDOTAI CO., LTD.;MASUMURA, HISASHI;TANAKA, KOUICHI;SUZUKI, FUMIO;MORITA, KOUZI;OKAMURA, KOUICHI;TOYAMA, NAOTAKA 发明人 MASUMURA, HISASHI;TANAKA, KOUICHI;SUZUKI, FUMIO;MORITA, KOUZI;OKAMURA, KOUICHI;TOYAMA, NAOTAKA
分类号 B05D1/32;B05D3/04;B24B7/00;B24B37/30;B25B11/00;H01L21/683;(IPC1-7):B24B37/04;H01L21/304 主分类号 B05D1/32
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