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发明名称
Ohmische Elektrode für halbleitendes kubisches Bornitrid vom N-Typ und Verfahren zur Herstellung
摘要
申请公布号
DE69422260(T2)
申请公布日期
2000.05.11
申请号
DE1994622260T
申请日期
1994.10.17
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.;RESEARCH INSTITUTE OF INNOVATIVE TECHNOLOGY FOR THE EARTH, KYOTO
发明人
TOMIKAWA, TADASHI;NISHIBAYASHI, TOSHIKI;SHIKATA, SHIN-ICHI
分类号
H01L29/43;H01L21/28;H01L21/285;H01L29/45;H01L33/30;H01L33/32;H01L33/40;(IPC1-7):H01L33/00;H01L29/40
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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