Sputter target for protective layer deposition on optical recording media, e.g. optical diskettes, comprises a sintered body of zinc sulfide, silicon dioxide and a mixed zinc and silicon oxide

摘要

A sputter target comprises a sintered body of zinc sulfide, silicon dioxide and a mixed zinc and silicon oxide. Independent claims are also included for the following: (i) a sputter target comprising zinc sulfide and silicon dioxide and having, in the sintered condition, a three-point bending strength (according to JIS R 1601) of >= 60 MPa and/or a thermal conductivity (according to JIS R 1601) of >= 9.8 W/m.K; (ii) a sputter target comprising a sintered body of zinc sulfide and silicon dioxide and produced by sintering a powder mixture of zinc sulfide, silicon dioxide and zinc oxide; and (iii) production of a sputter target by sintering a powder mixture of zinc sulfide, silicon dioxide and zinc oxide. Preferred Features: The mixed zinc and silicon oxide is zinc orthosilicate, Zn2SiO4.