PFC TYPE GAS RECOVERY METHOD AND DEVICE

摘要

A PFC type gas recovery method and device, wherein with the cryogenic separation process employed and without using a multi-stage fractional distillation device, very low temperature for a cooling trap can be easily attained by using a small-capacity refrigerator and high-purity PFC type gas can be recovered. The PFC type gas recovery method and device for recovering PFC type gas from PFC-type-gas-containing mixed gas discharged from a vacuum processing chamber (an etching chamber), wherein the PFC type gas recovery device comprises a cooling trap for freeze collection of mixed gas discharged from the vacuum processing chamber connected to an exhaust system in the vacuum processing chamber, and a non-PFC type gas removing device for removing other gases than the PFC type gas from recovered mixed gas that results from the evaporation of the freeze-collected material after stoppage of the operation of the cooling trap, and recovery means for recovering high-concentration PFC type gas obtained by removing other gases than the PFC type gas by the non-PFC type gas removing device.