| 摘要 |
PROBLEM TO BE SOLVED: To subject a cation exchange resin or a chelate resin to the contact treatment with a tetraalkylammonium ion-containing liquid and to prevent the early deterioration of the resin caused by the generation of a crack in the resin even if a regeneration cycle is repeated. SOLUTION: When a tetraalkylammonium(TAA) ion-containing liquid (e.g. photoresist developing waste soln.) is treated by using at least one resin among a strong acidic cation exchange resin, a weakly acidic cation exchange resin and a chelate resin or TAA ions are adsorbed and removed from the TAA ion-containing liquid by using at least one of the strongly acidic cation exchange resin and the weakly acidic cation exchange resin and water is subsequently recovered, the concn. of TAA ions of the TAA ion-containing liquid is set to 0.15 wt.% or less and the TAA ion-containing liquid is brought into contact with at least one resin to adsorb TAA ions. As a method for setting the concn. of TAA ions to 0.1-5 wt.% or less, other than a method for diluting water by other waste water, an electrodyalytic method, an electrolytic method, a reverse osmosis membrane treatment method and a biological method can be also used. The acid concn. of a regeneration agent at a time of the regeneration of at least one resin is pref. set to one equivalent/L (liter) or less. |
