| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form an antireflection film even in the case of a granular film raw material and to enable the mass-production thereof. SOLUTION: This device is provided with a cylindrical drum 50 fitted to a rotary shaft 52 in the horizontal direction, freely rotatable with the rotary shaft 52 as the center and also provided with a substrate arranging part 2, on the circumferential face, for loading substrates 15, cathodes 3 and 31 positioning inside and/or below the drum 50 and also arranged upwardly, power sources 4 and 41 applying high frequency electric power to the cathodes 3 and 31, a film raw material 5 composed of magnesium fluoride and placed on the cathodes 3 and 31, shutters 11 and 11a arranged in the space between the substrates 15 set to the substrate arranging part 2 and the film raw material 5 and cutting off the space therebetween so as to be capable of opening and closing, a vacuum tank 1 at least stored with the drum 50, the cathodes 3 and 31 and the shutters 11 and 11a at the inside and gas introducing means 13 and 13a introducing gas into the vacuum tank 1. |
