发明名称 Method and apparatus for infrared pyrometer calibration in a thermal processing system
摘要 A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibration instrument may include a fiber optic bundle to transmit light from the light source to the light emitting surface.
申请公布号 US6056433(A) 申请公布日期 2000.05.02
申请号 US19980007742 申请日期 1998.01.15
申请人 APPLIED MATERIALS, INC. 发明人 YAM, MARK
分类号 G01K15/00;G01J5/00;G01J5/02;G01J5/08;G01J5/52;H01L21/66;(IPC1-7):G01K15/00 主分类号 G01K15/00
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