Laser-ultrasound spectroscopy apparatus and method with detection of shear resonances for measuring anisotropy, thickness, and other properties

摘要

Apparatus and method for detecting shear resonances includes structure and steps for applying a radiation pulse from a pulsed source of radiation to an object to generate elastic waves therein, optically detecting the elastic waves generated in the object, and analyzing the elastic waves optically detected in the object. These shear resonances, alone or in combination with other information, may be used in the present invention to improve thickness measurement accuracy and to determine geometrical, microstructural, and physical properties of the object. At least one shear resonance in the object is detected with the elastic waves optically detected in the object. Preferably, laser-ultrasound spectroscopy is utilized to detect the shear resonances.