CHARGE CONVERTER PROVIDED IN AN ION IMPLANTATION APPARATUS,申请号KR19960058160-传众专利搜索

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发明名称	CHARGE CONVERTER PROVIDED IN AN ION IMPLANTATION APPARATUS
摘要
申请公布号	KR100254837(B1)	申请公布日期	2000.05.01
申请号	KR19960058160	申请日期	1996.11.27
申请人	NEC CORPORATION	发明人	GITAMURA, YOSIHIRO
分类号	C23C14/48;H01J27/02;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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