摘要 |
PROBLEM TO BE SOLVED: To optimize the amount of non-metal added to a paste by mixing a filler material with either a titania or zirconia related to a paste for a via of a ceramic substrate and external feature. SOLUTION: A via 2 is formed inside a substrate 1 comprising three layers of ceramic material layer, and related to the via 2, a paste is formed from either titania or zirconia or both 2A and any one of a plurality of standard fillers such as alumina, sub-micron alumina, etc., or a plurality of objects 2B, molybdenum 2C, glass 2D, etc. A surface layer with the bias 2 exposed is plated with a dry process nickel plating or its alloy ion. Thus, the amount of non-metal added to a paste is optimized. |