| 摘要 |
PROBLEM TO BE SOLVED: To facilitate a maintenance operation. SOLUTION: A hood part 20 equipped with a cooling unit, a heating unit and a blower unit is fixed to a rear door 12. Besides the rear door 12 is suspended from a suspending rail 15 and is made horizontally movable along the rail 15. Furthermore, a maintenance operation such as checking performance of the cooling unit, the heating unit and the blower unit in the state of actual operation is feasible by drawing the whole of the hood part 20 out from a chamber main body 10.
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