| 摘要 |
PURPOSE: A DLC coating method is provided to be capable of increasing a characteristic of emitting electrons by preventing a part except for a metal tip from being coated. CONSTITUTION: A cathode electrode(26) is formed on a lower substrate(26) so as for current to flow. A gate insulation layer(24) is formed on an upper side of the cathode electrode(26) so as to prevent a current from be leaked into a gate electrode(22), and the gate electrode(22) is formed on the gate insulation layer(24). A hole pattern(32) is formed in the gate insulation layer(24) and the gate electrode(22). Only the gate electrode(22) deposited together with a tip hole is exposed on the lower substrate(26), and an unexposed region is covered by the gate electrode(22).
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