| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for giving an alignment characteristic without contacting, without leaving ions in an alignment film and without bringing a chemical change in an alignment film molecules, and to provide simultaneously a contamination-free liq. crystal cell having excellent electric property. SOLUTION: A substrate 13 on which an alignment film is formed is fixed to a substrate holder 16. The holder 16 can be rotated around an axis 14 and shifted in directions X-Y. Aligning treatment is carried out by irradiating the substrate with a neutral atomic beam emitted from a high-energy atomic gun 11. The polar angle of incidenceθcan be varied by moving the atomic gun 11 along a moving locus 15 and a tilt angle can be varied in this way.
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