| 摘要 |
PROBLEM TO BE SOLVED: To prevent variance in the compsn. ratio when a magnetic film containing plural materials is formed by simultaneously discharging plural targets, by using an alloy target for at least one target of the plural targets. SOLUTION: A magneto-optical recording medium having a magnetic film of multilayered film is produced by using a device to form films of alloys or the like by simultaneously discharging targets of plural unit elements. As for the alloy target used, an alloy target of an alloy (XY) of an element (X) which is most dominant in the compsn. ratio of the magnetic film to be formed and of another element (Y) which forms the magnetic film is preferably used. By using the target having an almost the same compsn. as the compsn. of the alloy having the largest compsn. ratio in the multilayered magnetic film to be formed, and when the target compsn. is the same as the film compsn., the electric power applied on the target can be increased than for a single material, discharge and throughput can be stably improved.
|
