PROBE CARD AND MEASURING DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a probe card for electric characteristic measurement which can prevent side slip of a probe on an electrode on a measured material by reducing the overdrive amount and obtain 10 g of stylus pressure required for measuring and testing the electric characteristics of the measured material by the probe. SOLUTION: Plural probes 2 are arranged on the lower surface of a board 1. Plural probes 2 are fixed to a board 1 by a fixing part 3 positioned at the tip of the lower surface of the board 1. The probe 2 is bent at a designated angle to the lower surface of the board 1 near the rear part of the fixing part 3.1 A bent part 4 is formed on the tip of the probe 2, thereby putting the tip of the probe 2 vertical to the lower surface of the board 1. A portion of the probe 2 that is projected from the front end of the fixing part 3 is worked to be tapered (taper part 8). The length 7 (length from the front end of the fixing part 3 to the bent part 4) of a projection from the front end of the fixing part 3 of the probe 2 is set to 2.5 mm or less, and the length of the taper part 8 is set to 3.0 mm or less.