| 摘要 |
PROBLEM TO BE SOLVED: To observe and record a scanned/transmitted image and an electron beam diffraction image with a simple structure without requiring a two-dimensional detector by scanning a sample with an electron beam focused below the sample, and providing a function for displaying the electron beam diffraction image of the sample with the electron beam. SOLUTION: When a sample 6 is scanned by an electron beam 5 for observing a scanned/transmitted image with an objective lens 4 strongly excited, an electron beam 17 transmitting the sample 6 invariably enters a detector 13, and the scanned/transmitted image of the sample 6 is observed on a CRT 9 scanned synchronously with electron beam scanning. The electron beam diffracted by the sample 6 does not enter the detector 13. A lens power supply 15 is controlled by a lens current controller 16 to weakly excite the objective lens 4 for displaying an electron beam diffraction image. The electron beam incidence angle is changed synchronously with the scanning of the incident electron beam 5 in this case, spots of the electron beam diffraction image enter the detector 13, and the electron beam diffraction image is displayed on the CRT 9.
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