| 摘要 |
A micromechanical switch (100) includes a substrate (150), a gate electrode (130), a source electrode (120), a drain electrode (140), and various style beams (110). For example, a beam (110) may be relatively long and includes flexures (115, 116) on at least one end, and has a small activation voltage. Plural switches can be ganged together in order to switch high currents. Additionally, the switch (100) can be used in the formation of logic circuits.
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