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发明名称
Kryopumpe
摘要
申请公布号
DE69515720(D1)
申请公布日期
2000.04.27
申请号
DE1995615720
申请日期
1995.04.26
申请人
EBARA CORP., TOKIO/TOKYO
发明人
NOJI, NOBUHARU;HAYAKAWA, JUNICHI;SATOH, MOTOYASU;AONO, HIROSHI;KOMAI, TETSUO
分类号
F04B37/08;F04B49/06;(IPC1-7):F04B37/08
主分类号
F04B37/08
代理机构
代理人
主权项
地址
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