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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
EP0995219(A1)
申请公布日期
2000.04.26
申请号
EP19980932275
申请日期
1998.07.06
申请人
SURFACE TECHNOLOGY SYSTEMS LIMITED
发明人
LEA, LESLIE, MICHAEL;GUIBARRA, EDWARD
分类号
H05H1/46;H01J37/32;H01L21/302;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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