| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump in which a touchdown phenomenon is difficult to occur at the time of leak of atmosphere. SOLUTION: A rotor 4 is supported in a casing 3 by plural sets of control type magnetic bearings 13, 14, 15 in non-contact manner, and is rotated by an electric motor 16. An air inlet port 5 is provided at the casing 3. Plural exhaust ports 7a, 7b are provided in positions in which the outer peripheral part of the casing 3 is circumferentially equally divided.
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