| 摘要 |
PROBLEM TO BE SOLVED: To absorb an attaching error or a motion error of a pair of a Z-axis guides and to prevent damage and breakage of an X-axis guide installing part even when synchronism of a Z-axis carrier breaks. SOLUTION: An X-axis guide 3 is bearing supported by a first Z-axis carrier 2a through a rigid first bracket 4, and supported by a second Z-axis carrier 2b through a second bracket 5 having a flexible structure. A beam material 7 is laid between a pair of the Z-axis carriers 2a, 2b. The beam material 7 is divided at the center position thereof, and a pair of divided surfaces opposed to each other have surfaces which keep a noncontact state having a predetermined spacing and oppose to each other with a recessed part 7a and a projecting part 7b when viewed from a Z-axis direction.
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