METHOD FOR CONTROLLING SEMICONDUCTOR GAS EXHAUSTION SYSTEM

摘要

PURPOSE: A method for controlling a semiconductor gas exhaustion system is to open a cooling valve only when a toxic gas is introduced and thus improve whole efficiency of the gas exhaustion system. CONSTITUTION: A method comprises the steps of: determining whether an introduced gas into a gas exhaustion system has a toxic property; when it is determined that non-toxic gas is introduced, burning the introduced non-toxic gas using a burning part and an exhaustion part and thereafter exhausting the burnt gas to the outside without opening a cooling valve, while when it is determined that toxic gas is introduced, burning the toxic gas; opening the cooling valve to supply air and thereby cooling the burnt gas; and exhausting the cooled gas. A monitor part for monitoring whether a toxic gas is introduced is established in the burning part.