Dual etch step pad air bearing design with three etch depths

摘要

An air bearing slider having reduced mask misalignment sensitivities. For one embodiment, the air bearing slider has three etch surfaces formed by a dual etch process. The leading and trailing step regions are formed by a first etching step. The lateral step regions, adjacent to the air bearing pads, are formed by a second etching step. The negative pressure region is formed by both the first and second etching steps.