发明名称 |
Method for cleaning the surface of a dielectric |
摘要 |
This invention relates to a method for improving the chemical and electrical performance characteristics of a high dielectric constant material. The method comprises the steps of first obtaining a barium containing high dielectric constant material, the material having an upper surface and then modifying the surface chemistry of said upper surface by interacting said upper surface with a gas reactant in a closed environment. In a variant of the method, the gas reactant preferentially reacting with upper surface as compared to the bulk.
|
申请公布号 |
US6054328(A) |
申请公布日期 |
2000.04.25 |
申请号 |
US19960761166 |
申请日期 |
1996.12.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DUNCOMBE, PETER R.;KOTECKI, DAVID E.;LAIBOWITZ, ROBERT B.;NATZLE, WESLEY;YU, CHIENFAN |
分类号 |
H01L21/02;H01L21/306;H01L21/311;H01L21/316;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|