Package for enclosing microoptical and/or microelectronic devices so as to minimize the leakage of microwave electromagnetic radiation

摘要

The invention relates to a package for microoptical and/or microelectronic devices. The package is to be designed in such a way that package resonances initiated by standing waves produced in the package are completely avoided or very highly attenuated. This is achieved by making the package, in whole or in part, of a microwave-absorbing, nonoutgassing material. A suitable material is silicon or graphite, for example.