| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a head in which a Barkhausen noise can be suppressed while making a magnetic variation characteristic good. SOLUTION: A lower part shield layer 3 and a lower part insulation layer 4 are formed at the upper side of an AlTiC substrate 1. A soft magnetic layer 6 is formed on the surface of the lower insulation layer 4. When this soft magnetic layer 6 is formed, a target is arranged on the axis being tilted from the axis being perpendicular to the surface of the substrate 1 only at a prescribed angle and sputter is performed. A non-magnetic layer 7 and a fixed layer 8 are formed on the surface of the soft magnetic layer 6 by overhead filming and a spin valve film 5 is formed. Then, a hard bias layer 9a and an electrode layer 9b of a prescribed pattern are successively formed at the side of the spin valve film 5. Then, an upper part gap layer and an upper part shield layer are formed on the surface of the lower part insulation layer on which the spin valve layer and the electrode layer are formed, further, the prescribed layer is formed and a magnetoresistive head is manufactured by cutting it at a prescribed position.
|
