| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method, for a surface state, in which even a moving or high-temperature object can be inspected and in which the object can be inspected precisely and by a noncontact system even when the position, the posture and the distance of an inspection apparatus are changed a little. SOLUTION: A laser beam is projected obliquely on the face, to be inspected, of an object B. A reflected beam from the face, to be inspected, by the laser beam is received by a CCD camera 7 in terms of a face or in terms of a line. The distribution diagram of the intensity of a beam between the intensity of the beam and its beam receiving position is created. Then, a standard deviation when the distribution diagram is approximated to a normal distribution is found. On the basis of the relationship between the standard deviation and the surface roughness of the object and on the basis of the correspondence relationship between a standard deviation decided in advance by an experiment or a calculation and the surface roughness, the surface roughness of the object corresponding to a measured standard deviation is found.
|
