发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device which can excellently work under a low voltage by improving the working speed of a nonvolatile memory. SOLUTION: A semiconductor device is provided with a first gate insulating film 12 formed on a semiconductor substrate 10, a floating gate 13 formed on the film 12, a second gate insulating film 14 formed on the gate 13, and a control gate 15 formed on the floating gate 13. The floating gate 13 is formed in such a curve shape that only one end side of the gate 13 is protruded upward and the difference in film thickness between the protruded portion and non- protruded portion of the gate 13 is made larger than the difference in film thickness between both portions in the gate insulating film 12.
申请公布号 JP2000114402(A) 申请公布日期 2000.04.21
申请号 JP19980281144 申请日期 1998.10.02
申请人 MITSUBISHI ELECTRIC CORP 发明人 SUGIHARA TAKESHI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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