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发明名称
LIQUID MATERIAL-VAPORIZING AND SUPPLYING APPARATUS
摘要
申请公布号
KR0145188(B1)
申请公布日期
1998.07.15
申请号
KR19980001107
申请日期
1998.01.06
申请人
STEC INC
发明人
MIYAMOTO, HIDEAKI;ISHIDAWA, KOHICHI;KAWANO, TAKESHI
分类号
B01J4/02;B01J7/02;C30B25/14;(IPC1-7):C30B25/14
主分类号
B01J4/02
代理机构
代理人
主权项
地址
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